JPH02146341U - - Google Patents
Info
- Publication number
- JPH02146341U JPH02146341U JP5498289U JP5498289U JPH02146341U JP H02146341 U JPH02146341 U JP H02146341U JP 5498289 U JP5498289 U JP 5498289U JP 5498289 U JP5498289 U JP 5498289U JP H02146341 U JPH02146341 U JP H02146341U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sensor chip
- pressure sensor
- detection device
- pressure detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5498289U JPH02146341U (en]) | 1989-05-12 | 1989-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5498289U JPH02146341U (en]) | 1989-05-12 | 1989-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146341U true JPH02146341U (en]) | 1990-12-12 |
Family
ID=31577532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5498289U Pending JPH02146341U (en]) | 1989-05-12 | 1989-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146341U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6136164A (ja) * | 1984-07-25 | 1986-02-20 | 京セラ株式会社 | 導電性セラミツクス |
-
1989
- 1989-05-12 JP JP5498289U patent/JPH02146341U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6136164A (ja) * | 1984-07-25 | 1986-02-20 | 京セラ株式会社 | 導電性セラミツクス |